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- AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES (SUPERSEDING FED-STD-209D) (S/S BY ISO14644-1-1999 AND ISO14644-2-2000)
- standard by Federal Specifications and Standards, 09/11/1992
- Publisher: BS
This document establishes standard classes, and provides for alternative classes, of air cleanliness for cleanrooms and clean zones based on specified concentrations of airborne particles. It prescribes methods for verifying air cleanliness and requires that a plan be established for monitoring air cleanliness. It also provides a method for determining and describing concentrations (U descriptors) of ultrafine particles.